Skip to main content

An X-ray source you can rebuild: our microfocus X-ray tube line against Hamamatsu, Excillum NanoTube and Nikon's in-house targets.

Excillum resolves 150 nm and Hamamatsu ships a sealed 150 kV head that just works. Both answers assume the tube is a consumable bought again from the same country. An open tube with replaceable targets and filaments answers a different question.

In service, not experimental

Our microfocus X-ray tubes are the source inside working inspection cells across automotive, aerospace, electronics, energy and space applications, in four families covering high-power CT through to sub-micron package imaging. They are engineered and supported in-country, which is the point: the most consumable and most export-sensitive part of an inspection system stops being a foreign dependency.

Side by side

AttributeRepresented by UnstratMicrofocus X-ray systemsHamamatsu PhotonicsL12161-07 150 kV microfocus X-ray source1JapanExcillumNanoTube N3 (60 / 110 / 160 kV)2SwedenNikon MetrologyXT H Series microfocus sources (180 kV transmission, 225 kV reflection, multi-metal, Rotating.Target 2.0)3Japan / Belgium
Voltage range123Above 225 kV this comparison thins out quickly. For CT of thick castings, none of the three publishes a 300 kV option.160 to 300 kV, in 160, 190, 225, 240 and 300 kV nominal ratings0 to 150 kV setting range, 40 to 150 kV operational40 to 60 kV, 40 to 110 kV or 40 to 160 kV by model180 kV transmission, 225 kV reflection, multi-metal and rotating targets
Resolution or spot size123JIMA down to 0.5 µm; transmission tubes to 1 µm detectability, with a 0.2 µm high-resolution target for CT7 µm nominal in small focus mode, 5 µm at 4 W; 20 µm middle focus; 50 µm large focusMinimum resolution 150 nm across all three models, with long-term spot stability below 100 nm1 µm up to 3 W rising to 20 µm at 20 W on the 180 kV transmission target; 3 µm up to 7 W rising to 225 µm at 225 W on the 225 kV reflection target
Power on target123Reflection tubes to 300 W target and 350 W emission; dual-head XC line at 300 W reflection and 10 W transmission10 W small focus, 30 W middle focus, 75 W large focus maximum output3.6 W at 60 kV, 9.2 W at 110 kV, 16.6 W at 160 kV20 W on the 180 kV transmission target, 225 W on the 225 kV reflection target, 450 W on Rotating.Target 2.0
Tube construction123Open tube with vacuum unit; targets and filaments are replaceableSealed tube with integrated high voltage power supply and no high voltage cable connectionTransmission target of tungsten on diamond with a LaB6 high-brightness emitter, described as a long-life cathodeOpen tube stated to allow local maintenance of internal tube components; targets user-interchangeable, with Auto.Filament Control stated to double filament lifetime
Target materials offered123Be/W and diamond/W transmission targets; exchangeable Cu, Ag, Mo and Cr heads on the dual-head XC line with automatic recognitionTungsten target, beryllium output window 0.2 mm thickTungsten on diamondMulti-metal reflection target offered at 225 kV alongside the standard reflection target
Geometry options123Reflection, transmission, rod-anode and dual-head families; rod lengths 10 to 1,000 mm with SUPERFOCUS at 580, 730 and 960 mmFixed geometry, beam angle approximately 43°, focus to object distance approximately 17 mmCone-shaped front for close sample access, minimum focus-object distance 150 µm; head mountable upright, flat or verticalFour interchangeable target heads on a single 225 kV source, with motorised focus-to-imager distance on the ST 2x
Stated service life123System lifetime up to 20 years, because targets and filaments are replaced rather than the tubeNot publishedNot published as a lifetime; long-life cathode and elimination of the filament statedNot published as a lifetime; filament lifetime stated to be doubled by Auto.Filament Control
Head mass and installation123Not publishedX-ray tube unit approximately 13.5 kg, control unit approximately 6 kg, single phase 100 to 240 V, under 220 WHead 689 × 210 × 400 mm including cables, plus a 4U power module, a 4U chiller, a 1U control computer and a floor-standing HV generator, mountable up to 5 m from the headNot published separately from the system
Where the source is serviced123Engineered and supported in-country on an independent, non-aligned supply lineNot addressed in the datasheetNot addressed in the datasheetNot addressed in the brochure beyond local maintenance of internal tube components

Competitor values are quoted from the vendor documents listed under Sources, as published on the date shown. Configurations vary, so treat every row as a starting point for the evaluation rather than a like-for-like test result.

What the table means

Excillum is the resolution benchmark. Concede it and move on.

The NanoTube N3 publishes 150 nm minimum resolution and better than 100 nm long-term spot stability, on a LaB6 emitter firing at a tungsten-on-diamond transmission target. Nothing in our range claims that. What the N3 also is: 16.6 W maximum on target at 160 kV, delivered as a head plus power module, chiller, control computer and a floor-standing high voltage generator. It is a nanoCT and X-ray microscopy source. For CT of a thick casting or a munition section, its power budget rules it out and ours does not.

Sealed is simpler until the day it wears out.

Hamamatsu's L12161-07 is a clean piece of engineering: 5 µm at 4 W, 75 W maximum, integrated high voltage supply, no high voltage cable, 13.5 kg. It is also a sealed tube. When the target degrades, you buy another tube, from Japan, under whatever the export conditions of the day happen to be. Our tubes are open, vacuum-pumped, with replaceable targets and filaments, which is why we state a system lifetime of up to 20 years. Nikon reaches for the same argument, describing its open tube as allowing local maintenance of internal components and a lower cost of ownership. On this point Nikon and our principal agree, and Hamamatsu takes the other side.

Rod-anode and dual-head geometries are where the field runs out.

None of the three published documents in this comparison offers a rod anode. Our RA, RAC and SUPERFOCUS lines run from 10 mm to 1,000 mm of rod, which is how you image the inside of a bore, a small-diameter weld or a tube from within. The dual-head XC line carries exchangeable Cu, Ag, Mo and Cr heads with automatic recognition, so material contrast can be tuned without changing sources. That is not a resolution argument, it is an access argument, and access is what decides whether an inspection is possible at all.

Questions buyers ask

What is the best alternative to Hamamatsu or Excillum microfocus sources for a country that wants to service its own X-ray tubes?

Both are excellent sources and neither is designed to be rebuilt where you use it. Hamamatsu's L12161-07 is sealed, with the high voltage supply integrated, and Excillum's NanoTube N3 is a complete subsystem with its own generator and chiller. Our microfocus tube families are open tubes with a vacuum unit, replaceable targets and replaceable filaments, rated to 160 to 300 kV, with a stated system lifetime up to 20 years and support in-country.

How does the microfocus X-ray tube line compare with Excillum NanoTube N3 on resolution?

Excillum is finer. The N3 publishes 150 nm minimum resolution across 60, 110 and 160 kV with spot stability better than 100 nm. Our tube line publishes JIMA down to 0.5 µm and transmission detectability to 1 µm, with a 0.2 µm high-resolution CT target. The trade is power and range: the N3 delivers 3.6 to 16.6 W on target, while our reflection tubes reach 300 W on target and 350 W emission at up to 300 kV, which is what thick-section CT needs.

Why does tube lifetime matter more than spot size for a national inspection programme?

Because a source that cannot be replaced grounds the whole cell. A sealed tube ends its life as a purchase order in another jurisdiction; an ageing system with no available source becomes scrap. Our microfocus X-ray tubes are open, with targets and filaments changed in service, giving a stated lifetime up to 20 years. Over a twenty-year sustainment horizon, that is the specification that decides availability, not the last half micron of resolution.

Can a single microfocus source cover both electronics packaging and thick castings?

No, and be sceptical of anyone who says otherwise. Nikon solves it with four interchangeable target heads on one 225 kV source. We solve it with four tube families: transmission for sub-micron package work, reflection at up to 300 W for high-power CT and DR, rod anode for restricted-access geometries, and dual-head with Cu, Ag, Mo and Cr targets for material contrast. Specify the two hardest jobs in your workload, then pick the configuration that covers both.

Sources

  1. 1. Hamamatsu Photonics, 150 kV Microfocus X-ray Source L12161-07 (TXPR1023E) (copy held on this site)Retrieved: 2026-07-31
  2. 2. Excillum, NanoTube N3 datasheet (copy held on this site)Retrieved: 2026-07-31 · Same figures published on the NanoTube N3 product page at excillum.com.
  3. 3. Nikon Metrology, XT H Series: Advanced Industrial X-ray and CT (XT H Series_2CE-NNKH-5_1023) (copy held on this site)Retrieved: 2026-07-31
Next step on this comparison

Send us the requirement and the systems you are weighing. We will map this table onto it.